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MEMS Mechanical Sensors: (Mems--Microelectromechanical Systems Series)

(Hardback)

Steve P. Beeby, Graham Ensel, Neil M. White, Michael E. Kraft ,

Artech House Publishers (Publisher)

Published

2004

Reviews

Technology, Engineering, Agriculture, Industrial processes Electronics and communications engineering Electronics engineering

By: Steve P. Beeby, Graham Ensel, Neil M. White, Michael E. Kraft | Publisher: Artech House Publishers | Released: 30 Apr 2004

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The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.